Conformity - November 2008 - (Page 41) Roger J. Peirce is Director of Technical Services for Simco Ionization for Electronics Manufacture, and can be reached at rpeirce@esimco.com. Brad Williford is Global Semiconductor OEM Accounts Manager for Simco’s semiconductor ionization products, and can be reached at bwilliford@esimco.com. References 1. 2. 3. 4. R.J. Peirce, “CDM ESD Failure Modes in the Semiconductor Industry,” Solid State Technology, May 2007. M. Inoue et al., “Aerosol Deposition on Wafers,” IES Proceedings, 34th Annual Technical Meeting, 1988. R.P. Donovan, Particle Control For Semiconductor Manufacturing, New York, Marcel Decker Inc., 1990. Semi E78-0706, Electrostatic Compatibility Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment, SEMI, San Jose, CA. Semi E129-0706, Guide To Controlling Electrostatic Charge in a Semiconductor Manufacturing Facility, SEMI, San Jose, CA. Frank Curran, MS thesis, “The Effects of Static Charge on Silicon Wafers in the Semiconductor Industry,” The Engineering Council of England, Nov. 1997. L.B. Levit et al., “Contamination Control in Semiconductor Manufacturing,” Proceedings of SEMICON Taiwan, Taipei, Taiwan, Sept. 1999. L.B. Levit, T.M. Hanley, F. Curran, “Watch Out For Electrostatic Attraction,” Solid State Technology, June 2000. C.W. Long, J. Peterman, L.B. Levit, “Implementing a Static Control Program to Increase the Efficiency of Wet Cleaning Tools,” MICRO, Jan/Feb. 2006. 16. J. Montoya, L.B. Levit, A. English, “A Study of the Mechanisms for ESD Damage to Reticles,” Proceedings of the 22nd Annual EOS/ESD Society, Rome, NY, ESD Association, 2000, 394-405. 17. A. Steinman, L.B. Levit, “It’s The Hardware, No, Software, No, It’s ESD!” Solid State Technology Supplement, May 1999. 18. A.C. Rudack, M. Pendley, and L.B. Levit, “Measurement Technique Developed to Evaluate Transient EMI in a Photo Bay With and Without Ionization,” Proceedings of EOS/ESD Symposium 2000, Rome, NY, ESD Association, 2000, 379386. 19. J. Rush, et al., “Reducing Static-Related Defects and Controller Problems in Semiconductor Production Automation Equipment,” Proceedings of the SEMI Ultraclean Manufacturing Symposium, Oct. 1994. 20. G. Baumgartner, “The Misconceptions of Air Flow as a Tribocharging Source,” Proceedings of the 1992 EOS/ESD Symposium. 21. Niels Jonassen, “Induction: What It Means to ESD,” Compliance Engineering Mr. Static Series. 22. A. Steinman, L.B. Levit, C. Avery “Improving Particle Contamination Control with In-Tool Air Ionization” Solid State Technology, March 2007. 5. 6. 7. 8. 9. Comprehensive EMI Solutions, On Time & On Budget From design, quick-turn protos, and worldwide ISO9001 manufacturing, we are the superlative EMI solutions provider. The cornerstones of 10. M. Harrison, “Evaluation of Electrostatic Charges on Aerosol Particle Attractiveness to Silicon Wafers in Class-1 Cleanrooms,” Journal of the IEST, Jul/Aug. 1999. 11. L.B. Levit, L.G. Henry, J.A. Montoya, F.A. Marcelli, R.P. Lucero, “Investigating FOUPs as a Source of ESD-Induced electromagnetic Interference,” MICRO, Apr. 2002. 12. J. Wiley, A. Steinman, “Investigating a New Generation of ESD-Induced Reticle Defects,” MICRO 17, no. 4, 1999. 13. L.B. Levit, A. Steinman, “Investigating Static Charge Issues in Photolithography Areas,” MICRO, June 2000. 14. M. Yost et al., “Electrostatic Attraction and Particle Control,” Microcontamination 4, no. 6, 1986. 15. P.R. Bossard, R.G. Chemelli, B.A. Unger, “Charged Device Model ESD,” Proceedings EOS/ESD Symposium, San Diego, CA, 1980. our mission are simple: Quality. Integrity. Service. Value. It is this commitment to total solutions without compromise that has led to our established position as a premier designer, manufacturer & distributor of EMI filters and magnetic products. Plug into our comprehensive solutions. Radius Power is a leader in the design & manufacture of power products used to condition, regulate and govern electronic performance. The company provides a broad line of EMI Filters, Power Entry Modules, Power Transformers & Inductors to meet front-end requirements for AC & DC power line applications. We offer free pre-compliance testing for conducted emissions at our labs or yours! Bring us your EMI challenge & we will provide an optimized solution usually within 48 hours. Call Radius today. 714-289-0055 PH 714-289-2149 FAX 1751 N. BATAVIA ST. ORANGE, CA 92865 FAST Link www.conformity.com/2350 www.radiuspower.com november 2008 Conformity 1 http://www.radiuspower.com http://www.radiuspower.com http://www.conformity.com/2350
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