Project MEMS - January 2009 - (Page 15) feature Silicon Sensing Systems launched two new, silicon MEMS angular rate sensors – CRG20 and CRS09 – each based on a patented silicon ring gyro technology. The chip-scale CRG20 (see Fig. 5) is a lowcost miniature sensor derived from high-volume automotive designs that suits such applications as remote-control model helicopters, telematics, navigation aids, and robotics. Full digital closed-loop control electronics eliminate temperature and aging effects, and builtin temperature compensation enables stable performance over a wide range of operating conditions. It is available in ±300º/s and ±75º/s rate ranges with SPI or analog outputs. The CRS09 module is aimed at applications such as platform stabilization, measurement and test, and high-performance general navigation and aviation applications such as agriculture and AHRS. Its combination of Project Fig. 5. The chip-scale CRg20 angular-rate ring-gyro sensor is a high-precision low-cost device. Contents Viewpoint MeMS silicon MEMS gyro and highquality discrete electronics lets it be used where a fibre-optic gyro would previously have been the only solution. Kionix also introduced its latest MEMS inertial sensors, the KxRB5 series, designed specifically for personal navigation applications requiring a low-noise solution across a broad operating temperature range, such as cell phones, laptops, and sports diagnostic equipment. The sensor is said to have the lowest noise performance (45 μg/√ Hz) of a commercial-grade accelerometer of its size. The 3 x 5 x 0.9-mm unit’s operating current is 500 μA, and it is highly stable over temperature, has digital 3-wire SPI or analog output, resolves 12 to 14 bits, and can be factory programmed for Vdd from 2.5 to 5.25 V. Housed in an LGA package, the sensor not only suits inertial navigation and deadreckoning tasks, but also works in such applications as gesture recognition, inclination/tilt sensing, and free-fall detection. The MEMS accelerometers from the Aerospace & Defense division of PCB Piezotronics are aimed at measuring extreme 20,000-g shock at high altitudes. Smaller than the tip of a pencil, the model 3991 and 3993 sensors measure just 2.5 x 1.7 x 0.9 mm while incorporating a seismic mass, protective overrange stops, and a full-active piezoresistive Wheatstone bridge, which provides minimal zero shift, very low power consumption, and dc-response capability. Available in both single axis and triaxial configurations, the sensor is said to represent the state-ofthe-art in miniature, high-amplitude dc-response acceleration sensors, and can measure long-duration transient motion as well as responding to and surviving the extremely fast rise times associate with shock events. handling PreSSure Infineon introduced two MEMSbased pressure sensors tailored specifically to harsh industrial environments: the KP124 and the KP125. Surface-mount devices, they come in “green” packages and provide accuracies of ± 1.2 kPa ± 1.5% FS over an operating range of 40 to 115 kPa and -40º to 125ºC. Priced at $3.50 ea /10,000, the sensor transfer functions are calibrated and the outputs Solutions for Testing MEMS Devices on the Wafer Level Wireless Sensor Networks Have Arrived Choosing the Right Material for RF Packaging Home Page Product Training Module Online Ordering Suppliers Catalog 1 5 | P r o j E C T M E M S | vo L . 1 / N o . 1 http://www.siliconsensing.com http://www.kionix.com http://www.pcb.com http://www.infineon.com http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306136;32013581;k?http://digikey.com/PTM/PTMMaster.page?site=us&lang=en http://ad.doubleclick.net/clk;210306155;32013581;l?http://ordering.digikey.com/ordering/addpart.aspx?site=US&source=search http://ad.doubleclick.net/clk;210306414;32013581;j?http://digikey.com/Suppliers/SupplierIndex.page?site=us&lang=en http://ad.doubleclick.net/clk;210306629;32013581;r?http://dkc1.digikey.com/us/en/pdf/Current.html
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