Project MEMS - January 2009 - (Page 7) cover Story SPonSor advertiSeMent VTI TechnologIes scA3000 Demo KIT AVAIlAble AT DIgI-Key From Digi-Key, VTI Technologies’ SCA3000-D01 demo kit provides an easy way to demonstrate the MEMS accelerometer SCA3000 component functionality and the component’s properties. The demonstration kit consists of a SCA3000 sensor soldered on a chip carrier, a USB interface card, USB cable, and a Graphical User Interface (GUI) program. signals generated as a result of this stimulation. The devices may require testing in a controlled atmosphere to protect the device from environmental damage or to correctly simulate the environment in which the device will operate once packaged. click here for additional inforMation Fig. 2. Open test systems like the PA200 with PPM and MSA-500 can be reconfigured to suit test requirements. or single probes and electrically connected to the tester. Such systems are limited in their ability to perform MEMS tests, but by adding appropriate modules for non-electrical stimulation and/or detection of nonelectrical outputs, the wafer prober can be extended to an MeMS teSt equiPMent tyPeS open, universal test platform Since 2000, wafer-level test that can be easily reconfigured technology and equipment according to the test has been available from SUSS requirements (see Fig. 2). This MicroTec that enables on-wafer open platform is well suited for test of pressure sensors, RF testing differential and absolute MEMS, resonators, micromirrors, pressure sensors, microphones gas sensors, microbolometers, and micromirrors. and much more. The equipment Wafer-level test of MEMS was developed in conjunction with devices that are designed for new MEMS test technologies and operation in vacuum or a specific was mostly customer driven. gas environment need such Current wafer-level MEMS an environment for the test test systems are based on two phase. Additionally, studies of platforms: open and closed. In the growing reliability problems the semiconductor industry, can not be evaluated on open wafer-level tests are performed systems; they require precisely by the use of wafer probers. The controlled test environments. devices on the wafer have to be To perform these tests at reliably contacted by a probe card wafer-level, it is necessary to Project Contents Viewpoint MeMS Solutions for Testing MEMS Devices on the Wafer Level Wireless Sensor Networks Have Arrived Choosing the Right Material for RF Packaging Home Page Product Training Module Online Ordering Suppliers Catalog 7 | P r o j E C T M E M S | vo L . 1 / N o . 1 http://ad.doubleclick.net/clk;210725286;32013581;v?http://search.digikey.com/scripts/DkSearch/dksus.dll?Detail&name=551-1041-ND http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306136;32013581;k?http://digikey.com/PTM/PTMMaster.page?site=us&lang=en http://ad.doubleclick.net/clk;210306155;32013581;l?http://ordering.digikey.com/ordering/addpart.aspx?site=US&source=search http://ad.doubleclick.net/clk;210306414;32013581;j?http://digikey.com/Suppliers/SupplierIndex.page?site=us&lang=en http://ad.doubleclick.net/clk;210306629;32013581;r?http://dkc1.digikey.com/us/en/pdf/Current.html
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