Project MEMS - January 2009 - (Page 8) cover Story place the wafer prober inside a chamber (see Fig. 3). The chamber can be evacuated or filled with different gases and the pressure can be varied between high vacuum and a small positive pressure during ongoing tests. Simultaneously, the wafer temperature in the vacuum prober can be controlled between –60° and 200°C or in a cryogenic version even down to 77K (liquid nitrogen) or 4.2K (liquid helium). Similar to the open platform, suitable modules for nonelectrical stimulation and/ or detection of non-electrical output values can be added to the closed platform. This closed platform is particularly useful for testing RF MEMS, MEMS resonators, microbolometers, and inertial sensors like accelerometers and gyroscopes. ongoing effortS Future tasks for the MEMS industry include test standardization for both final packaged test as well as wafer-level test, the definition of design rules for simplifying the test of MEMS device, and the expansion of equipment and technology platforms to cover future MEMS devices. Formed to meet the challenges of wafer-level MEMS testing, MEMUNITY is an open community of MEMS testing experts from industry, research institutions, and academia. As a result of leveraging the expertise and know-how contained within MEMUNITY, several developments in waferlevel test technologies were achieved within the past two years, including the world’s only pressure chamber probe system. Recently, MEMUNITY finished coordinating the PAR-TEST project, which aimed to define the behavior of materials used in the production of MEMS devices and make them accessible to engineers. More specifically, advanced measurement techniques were developed that will enable engineers to determine the quality parameters of materials used in the production of MEMS devices—parameters that are critical for process control. One of the results of the MEMUNITY-coordinated PARTEST project was the development of a one-of-a-kind integrated wafer-level test system for MEMS devices that use a moveable membrane such as in pressure Project Contents Viewpoint MeMS Solutions for Testing MEMS Devices on the Wafer Level Wireless Sensor Networks Have Arrived Choosing the Right Material for RF Packaging Home Page Product Training Module Fig. 3. A vacuum prober provides a closed, tightly controlled environment for reliability evaluations. Online Ordering Suppliers Catalog 8 | P r o j E C T M E M S | vo L . 1 / N o . 1 http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306136;32013581;k?http://digikey.com/PTM/PTMMaster.page?site=us&lang=en http://ad.doubleclick.net/clk;210306155;32013581;l?http://ordering.digikey.com/ordering/addpart.aspx?site=US&source=search http://ad.doubleclick.net/clk;210306414;32013581;j?http://digikey.com/Suppliers/SupplierIndex.page?site=us&lang=en http://ad.doubleclick.net/clk;210306629;32013581;r?http://dkc1.digikey.com/us/en/pdf/Current.html
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