Project MEMS - January 2009 - (Page 9) cover Story SPonSor advertiSeMent omron mems Technology Flow sensors AVAIlAble AT DIgI-Key From Digi-Key, the Omron family of MEMS (Micro Electro Mechanical System) flow sensors includes intelligent compact models capable of measuring flow velocity and mass flow rate movement with highly repeatable accuracy. These sensors are available to measure mass flow rates from 1 LPM to 50 LPM (Liters per Minute). High sensitivity is achieved with the onboard MEMS flow chip. The D6F-P, D6F-V, and D6F-W sensors incorporate a Dust Segregation System (DSS), allowing them to be used to monitor the performance of fans, detect clogged filters in computers and projectors, and VAV control in commercial HVAC systems. sensors. The platform for the system was a semiautomatic probe system (the SUSS PA200) that provides precise, automated positioning and wafer mapping, an electrostatic probe card to stimulate the membrane, and a laser-Doppler vibrometer (the Polytec MSA-500) to measure out-of-plane movement. The membrane’s characteristics are extracted by measuring the eigenfrequencies and the resulting information is used to optimize the device design and the manufacturing process, as well as for known-good/bad die test. MEMUNITY continues to hold workshops and events to maintain its position as a driving force in moving MEMS devices out of the R&D labs and into the consumers’ hands. For more information about MEMUNITY, go to www.memunity.org. ShoP MeMS coMPonentS at digi-key Project Contents Viewpoint MeMS Solutions for Testing MEMS Devices on the Wafer Level Wireless Sensor Networks Have Arrived Choosing the Right Material for RF Packaging click here for additional inforMation Home Page Product Training Module MEMUNITY IS AN OPEN COMMUNITY OF MEMS TESTING ExPERTS FROM INDUSTRY, RESEARCH INSTITUTIONS, AND ACADEMIA. 9 | P r o j E C T M E M S | vo L . 1 / N o . 1 Online Ordering Suppliers Catalog http://www.memunity.org http://ad.doubleclick.net/clk;210801500;32013581;f?http://search.digikey.com/scripts/DkSearch/dksus.dll?lang=en&site=US&KeyWords=MEMS&x=0&y=0 http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://dkc1.digikey.com/us/en/ph/Omron/MEMS.html http://ad.doubleclick.net/clk;210306059;32013581;o?http://www.digikey.com/ http://ad.doubleclick.net/clk;210306136;32013581;k?http://digikey.com/PTM/PTMMaster.page?site=us&lang=en http://ad.doubleclick.net/clk;210306155;32013581;l?http://ordering.digikey.com/ordering/addpart.aspx?site=US&source=search http://ad.doubleclick.net/clk;210306414;32013581;j?http://digikey.com/Suppliers/SupplierIndex.page?site=us&lang=en http://ad.doubleclick.net/clk;210306629;32013581;r?http://dkc1.digikey.com/us/en/pdf/Current.html
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