IEEE Awards Booklet - 2010 - 4

I E E E

C O R P O R AT E

I E E E

R E C O G N I T I O N

2010 IEEE
Ernst Weber Engineering
Leadership Recognition

S E R V I C E

AWA R D

2010 IEEE
Haraden Pratt Award
Sponsored by IEEE Foundation

Sponsored by IEEE

Hidehito Obayashi

Raymond David Findlay

For outstanding engineering and managerial leadership
in the field of scanning electron microscopy, including
the creation and development of critical dimension SEMs
for VLSI manufacturing

For sustained leadership at IEEE and regional levels in
effecting positive change for IEEE and its members

Hidehito Obayashi's development and implementation of the
critical dimension scanning electron microscope (SEM) provided
an indispensible tool for semiconductor manufacturing that has
enabled the continued miniaturization of silicon wafers. The
ability to characterize the fine layers and structures of silicon
wafers is an important component of VLSI semiconductor manufacturing. As optical techniques became incapable of measuring
critical dimensions on shrinking silicon wafers, during the 1980s,
Dr. Obayashi converted the electron microscope, traditionally
used to examine samples with high resolution using accelerated
electrons, from a laboratory instrument into the critical dimension
SEM for use in semiconductor production. The use of a nondestructive electron gun instead of a thermal electron gun as a
source of electrons was crucial to the success of Dr. Obayashi's
device. His field emission electron gun provided a low-energy
electron beam with little radiation damage to the semiconductor material during measuring and monitoring. This enabled
high-speed measurement capabilities during continuous use on
production lines. Modifications were also needed to make conventional SEMs robust to challenging environments encountered
in semiconductor manufacturing including floor vibration,
magnetic field variations and clean room noise. Dr. Obayashi's
leadership was critical in incorporating electrical engineers and
computer scientists in the development process to address
these challenges. The result was a fully automated tool with
modular redesign capabilities that was easy to operate. An IEEE
Fellow, Dr. Obayashi began his career with Hitachi in 1969 and is
currently president, chief executive officer and director at Hitachi
High-Technologies Corporation, Tokyo, Japan.

Raymond David Findlay's knowledge of the history of electrical
engineering and IEEE, his dedication to member services and
student activities and his belief in IEEE as a transnational
technical society can be seen in his over 40 years of dedicated
volunteer service. Known for an ability to effect change in people
to produce positive results, Dr. Findlay has made an impact on
IEEE at all levels. His greatest contribution was perhaps the
leadership he provided as IEEE president-elect and president
during 2001-2002. At this time, IEEE's general fund was hit hard
when its investments took a downturn. Dr. Findlay led the efforts
to eliminate the deficit and put IEEE back on the path to financial
prosperity. During his term as vice president of the Regional
Activities Board from 96-97, he promoted dues levels that made
IEEE student membership attractive to undergraduates and
supported programs that encourage retention. He also introduced the "Centers of Excellence" concept to the IEEE
Foundation. As IEEE Region 7 director from 94-95, Dr. Findlay
was instrumental in effecting the merger of IEEE's Region 7 with
the Canadian Society of Electrical and Computer Engineering to
form "IEEE Canada." He became the first president of IEEE
Canada in 1995, and following his service the IEEE Canada
board elected him Director Emeritus. Dr. Findlay's professional
focus is low frequency electromagnetic fields and losses in electrical power devices, in which he has more than 200 publications.
An IEEE Life Fellow, Dr. Findlay is an Emeritus Professor at
McMaster University, Hamilton, Ontario, Canada.

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Table of Contents for the Digital Edition of IEEE Awards Booklet - 2010

IEEE Awards Booklet - 2010 - Cover1
IEEE Awards Booklet - 2010 - Cover2
IEEE Awards Booklet - 2010 - 1
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IEEE Awards Booklet - 2010 - Cover3
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