IEEE Awards Booklet - 2012 - 16

I E E E

T E C H N I C A L

F I E L D

AWA R D S

IEEE Technical Field Awards are presented annually at an IEEE technical conference.

2012 IEEE
Cledo Brunetti Award
Sponsored by Taiwan Semiconductor Manufacturing
Company Limited and the Brunetti Bequest

Yan Borodovsky and Sam Sivakumar
For contributions to developing and implementing innovative lithographic and patterning
equipment and processes to enable cost-effective scaling for logic technologies
As the architects of Intel Corporation's lithography technology
and strategy, Yan Borodovsky and Sam Sivakumar have
advanced the art and science of lithographic patterning and
kept Intel at the forefront of continued miniaturization of electronic devices. Mr. Borodovsky and Mr. Sivakumar were
instrumental in developing the first 45-nm lithography process
for Intel in 2007. By deploying a regular layout of unidirectional lines, they were able to extend 193-nm dry lithography
for use on Intel's 45-nm generation. Mr. Borodovsky and Mr.
Sivakumar then developed a robust patterning process using
immersion lithography for Intel's 32-nm generation. Their contributions again enabled Intel to move this technology into
production ahead of the industry. Mr. Borodovsky and Mr.
Sivakumar have also made innovative contributions to developing new resolution enhancement technology techniques,
including pixelated phase masks, chromeless phase-shift
masks, and inverse lithography. These techniques allow the

extension of immersion lithography to the 22-nm node, which
ushered in the era of Tri-Gate transistors with the start of mass
production in 2011.
An Intel Senior Fellow, Yan Borodovsky is currently director of
advanced lithography with Intel Corporation, Hillsboro, Ore.,
where he has worked since 1987.
An IEEE Member and Intel Fellow, Sam Sivakumar is currently
director of lithography with Intel Corporation, Hillsboro, Ore.,
where he has worked since 1990.

2012 IEEE
Components, Packaging and
Manufacturing Technology Award

2012 IEEE Control Systems Award

Sponsored by the IEEE Components, Packaging
and Manufacturing Technology Society

Sponsored by the IEEE Control
Systems Society

Mauro J Walker

Alberto Isidori

For advancing electronic manufacturing, technology,
and packaging worldwide through technical innovation
and cooperative leadership in industry, government,
academia, and professional organizations

For pioneering contributions to nonlinear control
theory
Alberto Isidori's groundbreaking work has changed the way the
control systems community thinks about nonlinear control. Dr.
Isidori's research in the early 1970s focused on systems realization,
resulting in the first complete theory of minimal realization for a class
of nonlinear systems. He then extended the geometric theory used
for feedback design in multivariable linear systems to general
classes of nonlinear systems. This work is considered a milestone in
the study of nonlinear feedback systems. He also developed the
concept of nonlinear zero dynamics, which has had fundamental
impact on designing feedback laws for nonlinear systems. His contributions to regulation and tracking in nonlinear systems resulted in
the design of a feedback law that solves the nonlinear equivalent of
the servomechanism problem in linear control. His Nonlinear
Control Systems (Springer Verlag, 3rd ed. 1995) is considered the
definitive treatment of nonlinear control systems and has had lasting
impact. An IEEE Life Fellow, Prof. Isidori is currently a professor of
systems and control with Sapienza University of Rome, Italy.

Mauro J Walker's contributions to advancing electronics manufacturing technology helped place Motorola and the United
States as leading high-volume manufacturers of portable electronic devices. Mr. Walker's leadership during the 1970s and
1980s drove the advanced technology necessary for miniaturization of portable communications such as pagers, two-way
radios, and cell phones. He established advanced manufacturing technology centers within Motorola, producing many
innovations including high-speed surface-mount chip assembly.
Mr. Walker was the founding chairman of the National Electronic
Manufacturing Initiative (NEMI), representing over 60 electronic
equipment manufacturers to improve the competitiveness of
North American electronics manufacturing companies. An IEEE
Life Fellow, Mr. Walker retired from Motorola, Inc. in 1998 as
senior vice president and director of manufacturing. He currently
resides in Ocean Ridge, Fla.
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Table of Contents for the Digital Edition of IEEE Awards Booklet - 2012