Evaluation Engineering - December 2008 - (Page 20) C-V MEASUREMENTS Fundamentals of Semiconductor C-V Measurements by Lee Stauffer, Keithley Instruments apacitance-voltage (C-V) testing is widely used to determine semiconductor parameters, particularly in MOSCAP and MOSFET structures. However, other types of semiconductor devices and technologies also can be characterized with C-V measurements, including bipolar junction transistors, JFETs, III-V compound devices, photovoltaic cells, MEMS devices, organic thin film transistor (TFT) displays, photodiodes, and carbon nanotubes. C performance. Reliability engineers use these measurements to qualify material suppliers, monitor process parameters, and analyze failure mechanisms. With appropriate methodologies, instrumentation, and software, a multitude of semiconductor device and material parameters can be derived. This information is used all along the production chain beginning with evaluation of epitaxially grown crystals including parameters such as average doping concentration, doping profiles, and carrier lifetimes. + Metal Silicon Dioxide ++++++++ C Meter (AC Signal) P-Type Figure 1. C-V Measurement Circuit for a MOSCAP Structure Formed on a P-Type Substrate The fundamental nature of these measurements makes them relevant to a wide range of applications and disciplines. They are used in the research labs of universities and semiconductor manufacturers to evaluate new materials, processes, devices, and circuits. C-V measurements are extremely important to product and yield enhancement engineers responsible for improving processes and device 2 0 • E E • December 2008 In wafer processes, C-V measurements can reveal oxide thickness, oxide charges, contamination from mobile ions, and interface trap density. These measurements continue to be important after other process steps such as lithography, etching, cleaning, dielectric and polysilicon depositions, and metallization. After devices are fully fabricated on the wafer, C-V is Continued on page 22 www.e v al u a ti o n e n g i n e e r i n g . c o m http://www.evaluationengineering.com
Table of Contents Feed for the Digital Edition of Evaluation Engineering - December 2008 Evaluation Engineering - December 2008 Contents Editorial Product Briefing Test Software C-V Measurements Nanoelectronics Test Product Guide Company Guide Machine Vision EMC Test Index of Advertisers Evaluation Engineering - December 2008 Evaluation Engineering - December 2008 - Evaluation Engineering - December 2008 (Page Cover1) Evaluation Engineering - December 2008 - Evaluation Engineering - December 2008 (Page Cover2) Evaluation Engineering - December 2008 - Evaluation Engineering - December 2008 (Page 1) Evaluation Engineering - December 2008 - Evaluation Engineering - December 2008 (Page 2) Evaluation Engineering - December 2008 - Contents (Page 3) Evaluation Engineering - December 2008 - Contents (Page 4) Evaluation Engineering - December 2008 - Contents (Page 5) Evaluation Engineering - December 2008 - Editorial (Page 6) Evaluation Engineering - December 2008 - Editorial (Page 7) Evaluation Engineering - December 2008 - Product Briefing (Page 8) Evaluation Engineering - December 2008 - Product Briefing (Page 9) Evaluation Engineering - December 2008 - Product Briefing (Page 10) Evaluation Engineering - December 2008 - Product Briefing (Page 11) Evaluation Engineering - December 2008 - Product Briefing (Page 12) Evaluation Engineering - December 2008 - Product Briefing (Page 13) Evaluation Engineering - December 2008 - Test Software (Page 14) Evaluation Engineering - December 2008 - Test Software (Page 15) Evaluation Engineering - December 2008 - Test Software (Page 16) Evaluation Engineering - December 2008 - Test Software (Page 17) Evaluation Engineering - December 2008 - Test Software (Page 18) Evaluation Engineering - December 2008 - Test Software (Page 19) Evaluation Engineering - December 2008 - C-V Measurements (Page 20) Evaluation Engineering - December 2008 - C-V Measurements (Page 21) Evaluation Engineering - December 2008 - C-V Measurements (Page 22) Evaluation Engineering - December 2008 - C-V Measurements (Page 23) Evaluation Engineering - December 2008 - C-V Measurements (Page 24) Evaluation Engineering - December 2008 - C-V Measurements (Page 25) Evaluation Engineering - December 2008 - Nanoelectronics Test (Page 26) Evaluation Engineering - December 2008 - Nanoelectronics Test (Page 27) Evaluation Engineering - December 2008 - Nanoelectronics Test (Page 28) Evaluation Engineering - December 2008 - Nanoelectronics Test (Page 29) Evaluation Engineering - December 2008 - Nanoelectronics Test (Page 30) Evaluation Engineering - December 2008 - Nanoelectronics Test (Page 31) Evaluation Engineering - December 2008 - Product Guide (Page 32) Evaluation Engineering - December 2008 - Product Guide (Page 33) Evaluation Engineering - December 2008 - Product Guide (Page 34) Evaluation Engineering - December 2008 - Product Guide (Page 35) Evaluation Engineering - December 2008 - Company Guide (Page 36) Evaluation Engineering - December 2008 - Company Guide (Page 37) Evaluation Engineering - December 2008 - Machine Vision (Page 38) Evaluation Engineering - December 2008 - Machine Vision (Page 39) Evaluation Engineering - December 2008 - Machine Vision (Page 40) Evaluation Engineering - December 2008 - Machine Vision (Page 41) Evaluation Engineering - December 2008 - Machine Vision (Page 42) Evaluation Engineering - December 2008 - Machine Vision (Page 43) Evaluation Engineering - December 2008 - EMC Test (Page 44) Evaluation Engineering - December 2008 - EMC Test (Page 45) Evaluation Engineering - December 2008 - EMC Test (Page 46) Evaluation Engineering - December 2008 - EMC Test (Page 47) Evaluation Engineering - December 2008 - EMC Test (Page 48) Evaluation Engineering - December 2008 - EMC Test (Page 49) Evaluation Engineering - December 2008 - EMC Test (Page 50) Evaluation Engineering - December 2008 - EMC Test (Page 51) Evaluation Engineering - December 2008 - Index of Advertisers (Page 52) Evaluation Engineering - December 2008 - Index of Advertisers (Page Cover3) Evaluation Engineering - December 2008 - Index of Advertisers (Page Cover4)
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