Evaluation Engineering - December 2008 - (Page 24)

C-V MEASUREMENTS curacy of a C measurement is rapidly degraded so high D is a limiting factor in the practical use of a C meter. Again, higher frequencies can help solve the problem. At higher frequencies, the capacitive impedance is lower, resulting in a C current that is higher and more easily measured. Obtaining Useful Data In addition to accuracy issues, practical considerations in C-V data collection include the instrumentation’s range of test variables, versatility of parameter extraction software, and ease of hardware usage. Traditionally, C-V testing has been limited to about 30 V and 10 mA DC bias. However, many applications such as characterizing laterally diffused MOS structures, low-k interlayer dielectrics, MEMS devices, organic TFT displays, and photodiodes require tests at higher voltage or current. For these applications, a separate high-voltage DC power supply and C meter are required; DC bias from 0 to ±400 V and a current output up to 300 mA are very useful. Being able to apply differential DC bias on both the HI and LO terminals of the C-V C-V measurements are extremely important to product and yield enhancement. instrument offers more ﬂexible control over electric fields within the DUT, which is very helpful in researching and modeling novel devices such as nanoscale components. The instrumentation software should include ready-to-run test routines that do not require user programming. CURVE TRACER Need a Curve Tracer? VCESAT VS. IB 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0.0 10E-06 100E-06 1E-03 10E-03 100E-03 Under $24,000 (Limited Time Offer) 5000 1E+00 Contact Us for a FREE Brochure and a Demo CD These should be available for the most widely used device technologies and test regimens. Some researchers also may be interested in less common tests such as performing both a C-V and C-f sweep on a metal-insulator-metal capacitor, measuring small interconnect capacitance on a wafer, or doing a C-V sweep on a two-terminal nanowire device. The parameter extractions should be easily obtained with automated curve plotting. Often, engineers and researchers are expected to perform C-V measurements with little experience and training on the instrumentation. A test system with an intuitive user interface and easy-to-use features makes this practical. Simple test setup, sequence control, and data analysis are essential. Otherwise, you spend more time learning the system than collecting and using the data. Other considerations for a test system include: • Tightly integrated source-measure units, a digital oscilloscope, and a C-V meter • Easy integration with other external instruments • DC biasing down to millivolts and capacitance measurements down to femtofarads to support high-resolution, precise measurements at the probe tips • Test setups and libraries that can be easily modiﬁed • Diagnostic/troubleshooting tools that let you know whether or not the system is performing correctly VCESAT (V) SERIES Wide Selection of Available Curves Programmable Data Point Increments Increments may be Linear or Logorithmic y Save and Recall Run up to 10 Curve Programs Standard Fixture Pattern About the Author Lee Stauffer is a senior marketer responsible for developing and supporting products for the semiconductor manufacturing and research markets at Keithley Instruments. His formal education in electrical engineering and semiconductor device physics is complemented by 20 years experience in semiconductor process and product engineering, device characterization, and instrumentation design. Keithley Instruments, 28775 Aurora Rd., Cleveland, OH 44139, 440-248-0400, e-mail: lstauffer@keithley.com www.e v al u a ti o n e n g i n e e r i n g . c o m TM Your Discrete Test Source Scientific Test, Inc. 1110 E. Collins Blvd., Ste 130 Richardson, Texas 75081 972.479.1300 | FAX 972.479.1301 E-Mail info@scitest.com Website www.scitest.com Visit www.rsleads.com/812ee-017 http://www.rsleads.com/812ee-017 http://www.rsleads.com/812ee-017 http://www.rsleads.com/812ee-017 http://www.evaluationengineering.com

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Evaluation Engineering - December 2008 Contents Editorial Product Briefing Test Software C-V Measurements Nanoelectronics Test Product Guide Company Guide Machine Vision EMC Test Index of Advertisers

Evaluation Engineering - December 2008

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