ASHRAE Journal - July 2021 - 38

TECHNICAL FEATURE
Conserving Energy at
Semiconductor Factory
BY JORGE BAZAN, P.E., MEMBER ASHRAE; RALPH COHEN, P.E., LIFE MEMBER ASHRAE
The operating cost, industrial city water consumption and carbon footprint were
reduced for three systems in an existing semiconductor factory. Measures used include
retrofitting chiller variable speed drives and re-piping air compressors to use warmer
chilled water return rather than cooler chilled water supply. Elements of this project can
be implemented in facilities with chillers and simultaneous heating loads.
High outdoor air heating and cooling loads, coupled
with significant compressed, oil free air manufacturing
equipment cooling load and deionized water heating
requirements (specifically, supply to reverse osmosis
system), provide semiconductor manufacturing facilities
(often called a FAB) a significant opportunity to
recover heat from chillers and air compressors. This
heat can then be used to eliminate boilers for most
HVAC and deionized water heating.
By 2004, the authors had sufficient experience with
" intensive heat recovery, " 1 in a FAB at this site, which led
to " intensive heat recovery " becoming the plan of record
for the company's new microprocessor manufacturing
facilities worldwide. More recently, a hard look was
taken at facilities predating 2004 to see if some or all of
the plan of record attributes could be retrofit.
Although the example in this article is a semiconductor
manufacturing facility, whenever there are high
cooling loads and simultaneous heating loads, it may be
cost effective to configure or reconfigure the systems to
take advantage of the waste heat from the chilled water
system or cooling from industrial city water used in
processes.
The general approach in this study was to understand
and analyze the existing design. Then, they would determine
how systems could be modified to replicate plan
of record system design features such as heat recovery,
reset strategy, application of variable speed drives, utilization
of air compressor heat, etc. Or they could implement
an innovative solution such as configuring an
existing chiller to operate as a heat pump through base
loading and elevating the condenser water temperature
to provide heat for a process load.
A separate study was done to consider implementing
additional chiller heat recovery to provide the HVAC
heat needs and reduce boiler load for this factory. The
separate study's results are not addressed in this article.
Original Configuration
The chilled water plant (Figure 1) was commissioned in
1999; an expansion was commissioned in 2012.
Three principal systems were impacted by the retrofit:
Jorge Bazan, P.E., is a senior mechanical engineer at Intel Corporation in Hillsboro, Ore. Ralph Cohen, P.E., specializes in facility systems energy reduction for high-tech manufacturers
at Ralph M. Cohen Consultancy in Portland, Ore.
38
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ASHRAE Journal - July 2021

Table of Contents for the Digital Edition of ASHRAE Journal - July 2021

Contents
ASHRAE Journal - July 2021 - Intro
ASHRAE Journal - July 2021 - Cover1
ASHRAE Journal - July 2021 - Cover2
ASHRAE Journal - July 2021 - 1
ASHRAE Journal - July 2021 - Contents
ASHRAE Journal - July 2021 - 3
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ASHRAE Journal - July 2021 - Cover4
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