ASHRAE Journal - July 2021 - 38

TECHNICAL FEATURE
Conserving Energy at
Semiconductor Factory
BY JORGE BAZAN, P.E., MEMBER ASHRAE; RALPH COHEN, P.E., LIFE MEMBER ASHRAE
The operating cost, industrial city water consumption and carbon footprint were
reduced for three systems in an existing semiconductor factory. Measures used include
retrofitting chiller variable speed drives and re-piping air compressors to use warmer
chilled water return rather than cooler chilled water supply. Elements of this project can
be implemented in facilities with chillers and simultaneous heating loads.
High outdoor air heating and cooling loads, coupled
with significant compressed, oil free air manufacturing
equipment cooling load and deionized water heating
requirements (specifically, supply to reverse osmosis
system), provide semiconductor manufacturing facilities
(often called a FAB) a significant opportunity to
recover heat from chillers and air compressors. This
heat can then be used to eliminate boilers for most
HVAC and deionized water heating.
By 2004, the authors had sufficient experience with
" intensive heat recovery, " 1 in a FAB at this site, which led
to " intensive heat recovery " becoming the plan of record
for the company's new microprocessor manufacturing
facilities worldwide. More recently, a hard look was
taken at facilities predating 2004 to see if some or all of
the plan of record attributes could be retrofit.
Although the example in this article is a semiconductor
manufacturing facility, whenever there are high
cooling loads and simultaneous heating loads, it may be
cost effective to configure or reconfigure the systems to
take advantage of the waste heat from the chilled water
system or cooling from industrial city water used in
processes.
The general approach in this study was to understand
and analyze the existing design. Then, they would determine
how systems could be modified to replicate plan
of record system design features such as heat recovery,
reset strategy, application of variable speed drives, utilization
of air compressor heat, etc. Or they could implement
an innovative solution such as configuring an
existing chiller to operate as a heat pump through base
loading and elevating the condenser water temperature
to provide heat for a process load.
A separate study was done to consider implementing
additional chiller heat recovery to provide the HVAC
heat needs and reduce boiler load for this factory. The
separate study's results are not addressed in this article.
Original Configuration
The chilled water plant (Figure 1) was commissioned in
1999; an expansion was commissioned in 2012.
Three principal systems were impacted by the retrofit:
Jorge Bazan, P.E., is a senior mechanical engineer at Intel Corporation in Hillsboro, Ore. Ralph Cohen, P.E., specializes in facility systems energy reduction for high-tech manufacturers
at Ralph M. Cohen Consultancy in Portland, Ore.
38
ASHRAE JOURNAL ashrae.org J U LY 2021
http://www.ashrae.org

ASHRAE Journal - July 2021

Table of Contents for the Digital Edition of ASHRAE Journal - July 2021

Contents
ASHRAE Journal - July 2021 - Intro
ASHRAE Journal - July 2021 - Cover1
ASHRAE Journal - July 2021 - Cover2
ASHRAE Journal - July 2021 - 1
ASHRAE Journal - July 2021 - Contents
ASHRAE Journal - July 2021 - 3
ASHRAE Journal - July 2021 - 4
ASHRAE Journal - July 2021 - 5
ASHRAE Journal - July 2021 - 6
ASHRAE Journal - July 2021 - 7
ASHRAE Journal - July 2021 - 8
ASHRAE Journal - July 2021 - 9
ASHRAE Journal - July 2021 - 10
ASHRAE Journal - July 2021 - 11
ASHRAE Journal - July 2021 - 12
ASHRAE Journal - July 2021 - 13
ASHRAE Journal - July 2021 - 14
ASHRAE Journal - July 2021 - 15
ASHRAE Journal - July 2021 - 16
ASHRAE Journal - July 2021 - 17
ASHRAE Journal - July 2021 - 18
ASHRAE Journal - July 2021 - 19
ASHRAE Journal - July 2021 - 20
ASHRAE Journal - July 2021 - 21
ASHRAE Journal - July 2021 - 22
ASHRAE Journal - July 2021 - 23
ASHRAE Journal - July 2021 - 24
ASHRAE Journal - July 2021 - 25
ASHRAE Journal - July 2021 - 26
ASHRAE Journal - July 2021 - 27
ASHRAE Journal - July 2021 - 28
ASHRAE Journal - July 2021 - 29
ASHRAE Journal - July 2021 - 30
ASHRAE Journal - July 2021 - 31
ASHRAE Journal - July 2021 - 32
ASHRAE Journal - July 2021 - 33
ASHRAE Journal - July 2021 - 34
ASHRAE Journal - July 2021 - 35
ASHRAE Journal - July 2021 - 36
ASHRAE Journal - July 2021 - 37
ASHRAE Journal - July 2021 - 38
ASHRAE Journal - July 2021 - 39
ASHRAE Journal - July 2021 - 40
ASHRAE Journal - July 2021 - 41
ASHRAE Journal - July 2021 - 42
ASHRAE Journal - July 2021 - 43
ASHRAE Journal - July 2021 - 44
ASHRAE Journal - July 2021 - 45
ASHRAE Journal - July 2021 - 46
ASHRAE Journal - July 2021 - 47
ASHRAE Journal - July 2021 - 48
ASHRAE Journal - July 2021 - 49
ASHRAE Journal - July 2021 - 50
ASHRAE Journal - July 2021 - 51
ASHRAE Journal - July 2021 - 52
ASHRAE Journal - July 2021 - 53
ASHRAE Journal - July 2021 - 54
ASHRAE Journal - July 2021 - 55
ASHRAE Journal - July 2021 - 56
ASHRAE Journal - July 2021 - 57
ASHRAE Journal - July 2021 - 58
ASHRAE Journal - July 2021 - 59
ASHRAE Journal - July 2021 - 60
ASHRAE Journal - July 2021 - 61
ASHRAE Journal - July 2021 - 62
ASHRAE Journal - July 2021 - 63
ASHRAE Journal - July 2021 - 64
ASHRAE Journal - July 2021 - 65
ASHRAE Journal - July 2021 - 66
ASHRAE Journal - July 2021 - 67
ASHRAE Journal - July 2021 - 68
ASHRAE Journal - July 2021 - 69
ASHRAE Journal - July 2021 - 70
ASHRAE Journal - July 2021 - 71
ASHRAE Journal - July 2021 - 72
ASHRAE Journal - July 2021 - 73
ASHRAE Journal - July 2021 - 74
ASHRAE Journal - July 2021 - 75
ASHRAE Journal - July 2021 - 76
ASHRAE Journal - July 2021 - 77
ASHRAE Journal - July 2021 - 78
ASHRAE Journal - July 2021 - 79
ASHRAE Journal - July 2021 - 80
ASHRAE Journal - July 2021 - 81
ASHRAE Journal - July 2021 - 82
ASHRAE Journal - July 2021 - 83
ASHRAE Journal - July 2021 - 84
ASHRAE Journal - July 2021 - 85
ASHRAE Journal - July 2021 - 86
ASHRAE Journal - July 2021 - 87
ASHRAE Journal - July 2021 - 88
ASHRAE Journal - July 2021 - 89
ASHRAE Journal - July 2021 - 90
ASHRAE Journal - July 2021 - 91
ASHRAE Journal - July 2021 - 92
ASHRAE Journal - July 2021 - 93
ASHRAE Journal - July 2021 - 94
ASHRAE Journal - July 2021 - 95
ASHRAE Journal - July 2021 - 96
ASHRAE Journal - July 2021 - 97
ASHRAE Journal - July 2021 - 98
ASHRAE Journal - July 2021 - 99
ASHRAE Journal - July 2021 - 100
ASHRAE Journal - July 2021 - 101
ASHRAE Journal - July 2021 - 102
ASHRAE Journal - July 2021 - 103
ASHRAE Journal - July 2021 - 104
ASHRAE Journal - July 2021 - 105
ASHRAE Journal - July 2021 - 106
ASHRAE Journal - July 2021 - 107
ASHRAE Journal - July 2021 - 108
ASHRAE Journal - July 2021 - 109
ASHRAE Journal - July 2021 - 110
ASHRAE Journal - July 2021 - 111
ASHRAE Journal - July 2021 - 112
ASHRAE Journal - July 2021 - Cover3
ASHRAE Journal - July 2021 - Cover4
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2021november
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2021november_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_XCODFR
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_QSLFGO
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_ILKVNM
https://www.nxtbook.com/nxtbooks/ashrae/ashraemexico_2021
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_OPDJKD
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_VJKSRY
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_SDHUTC
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_JPPKRR
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_SDLTTH
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_CKLLES
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_SLDOX
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_HJETUK
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_OLUHGE
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2020october
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2020october_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_ZERDGH
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_QVMNEO
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_RTPOKE
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_BBATRE
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_STUBMW
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_TPEMPE
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_JNMKDS
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_FBTTPA
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_WQMMNE
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_TVBRYN
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_showguide2020
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_KTUZMA
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_ABEDGD
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201910
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201909
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2019septmeber_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2019september
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201908
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201907
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201906
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201905
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201904
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_2019april
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201903
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_2019march
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201902
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201901
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_showguide2019
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_2018december
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_2018november
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2018fall_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2018fall
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_2018october
https://www.nxtbook.com/nxtbooks/ashrae/ashraemexico_2018
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201810
https://www.nxtbook.com/nxtbooks/ashrae/ashraeinsights_201806
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201805
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201804
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201803
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201712
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201711
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201710
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2017fall_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2017fall
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201709
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201705
https://www.nxtbook.com/nxtbooks/ashrae/ashrae_meetinginsert_201610
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2016fall_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2016fall
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_acrexindia
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2015summer_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_amca_2015summer
https://www.nxtbook.com/nxtbooks/amca/2014summer2
https://www.nxtbook.com/nxtbooks/amca/2014summer
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_acma_2014summer
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201311
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201309
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_acmasupp_2013fall
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201305
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201303
https://www.nxtbook.com/nxtbooks/ashrae/pubcatalog_2013winter
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201211
https://www.nxtbook.com/nxtbooks/ashrae/achr_expo_mexico2012
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201209
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201208_v3
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201208_v2
https://www.nxtbook.com/nxtbooks/ashrae/pubcatalog_2012summer
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201205
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201203
https://www.nxtbook.com/nxtbooks/ashrae/pubcatalog_2012winter
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201111_v2
https://www.nxtbook.com/nxtbooks/ashrae/ashraejournal_201109_v2
https://www.nxtbook.com/nxtbooks/ashrae/pubcatalog_2011summer
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201105
https://www.nxtbook.com/nxtbooks/ashrae/meetingplanner_201103
https://www.nxtbookmedia.com