IEEE Awards Booklet - 2009 - 13

I E E E

T E C H N I C A L

F I E L D

AWA R D S

2009 IEEE
Cledo Brunetti Award

2009 IEEE
Control Systems Award

Sponsored by the Brunetti Bequest

Sponsored by IEEE Control Systems Society

Burn Jeng Lin

David Quinn Mayne

For contributions to immersion lithography for the
manufacture of integrated circuit devices

For contributions to the application of optimization to
modern control theory

Burn J. Lin is recognized as a technical leader in the semiconductor
manufacturing industry and most responsible for 193-nm immersion
lithography. In 2002, Dr. Lin proposed immersion lithography, which
is a resolution-enhancement process that replaces the air gap
between the lens and the wafer surface with a liquid medium, such
as purified water. Through Dr. Lin's perseverance in convincing the
industry that a change was needed, immersion lithography was
adopted, and manufacturing of 45-nm feature sizes and smaller
have become possible. He has continued the cause for immersion
lithography with groundbreaking papers that have mapped out
scaling laws for super-high numerical aperture immersion optics,
and he has led the development of defect-reduction methods to
address concerns regarding the technology. As a result, immersion
lithography has quickly become a manufacturing technology in just
a few years. An IEEE Life Fellow, Dr. Lin is currently the senior director
of the Nanopatterning Technology Division at TSMC, Ltd., the
world's largest silicon foundry.

David Quinn Mayne's wide collection of research contributions has
had tremendous impact on the development of control theory.
Among these, the most important is his work in optimizing model
predictive control (MPC), in which he provided a rigorous mathematical basis for analyzing MPC algorithms. His framework for
studying the stability of MPC loops has become highly influential in
MPC, whose impact can be seen in today's high-speed electromechanical, aerospace and automotive systems. Dr. Mayne was the
first to describe what is now known as "particle filtering," which is
one of the central building blocks in nonlinear filtering. These
methods are used in a vast array of applications including vehicle
autopilots, aircraft tracking and the prediction of commodity
prices. He also introduced the concept of differential dynamic programming as a method for solving optimal control problems and
provided early guidelines for adaptive control. An IEEE Life Fellow,
Dr. Mayne is currently an emeritus professor and senior research
investigator at Imperial College London.

2009 IEEE Electromagnetics Award

2009 IEEE
Components, Packaging and
Manufacturing Technology Award

Sponsored by IEEE Antennas and
Propagation, IEEE Electromagnetic
Compatibility, IEEE Microwave Theory
and Techniques and IEEE Geoscience and
Remote Sensing Societies

Sponsored by IEEE Components, Packaging
and Manufacturing Technology Society

George G. Harman

Kenneth K. Mei

For achievements in wire bonding technologies

For contributions to computational electromagnetics
and Maxwellian circuits

George G. Harman's career has been dedicated to understanding,
standardizing and improving wire bond technology. His contributions toward transforming a labor-intensive, manual and sometimes
unreliable procedure into an automated, reliable process have
enabled wire bonding to become the standard for semiconductor
interconnections. Harman developed a 60- to 120-kHz floatingcone capacitor microphone system to plot the ultrasonic vibration
modes of bonding tools when the Poseidon strategic missile was
experiencing unpredictable wire bond reliability problems. The
results of this work were applied toward improving process control
and measurement methods and to yield a better understanding of
other problems in the ultrasonic bonding machines/processes. He
started the ASTM F-01.07 Committee to standardize wire bond
testing methods and was responsible for updating these standards
in 2006. He also wrote the first version of the nondestructive bond
pull test used for MIL-STD-833, which is currently required for most
critical space parts used by NASA. He holds four patents and has
won numerous awards. An IEEE Life Fellow, Mr. Harman is currently
an NIST Scientist Emeritus and consultant.

Kenneth K. Mei is one of the most innovative researchers in computational electromagnetics. His work over four decades has led to
solutions in electromagnetic problems that would have otherwise
been too large even for computers to handle. Dr. Mei's Ph.D. work
on formulating Maxwell's equations into integral equations, now
known as the "method of moments," is credited as the beginning
of the era of computational electromagnetics and perhaps one of
the most important and widely used numerical analysis techniques
for analyzing scattering, antenna and microstrip circuit problems.
He was able to show that there are circuits whose solutions should
be identical to the solutions of Maxwell's equations of the same
problem, which better demonstrates correct behavior at both low
and high frequencies. This will play an important role in keeping
devices small even as the integrated circuit technology itself
reaches its size reduction limits. An IEEE Life Fellow, Mei is an
honorary professor at the City University of Hong Kong, Kowloon,
an adjunct professor at Shanghai University of China and Professor
Emeritus at the UC, Berkeley.

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