IEEE Awards Booklet - 2017 - 13

2017 ieee medals

IEEE Dennis J. Picard Medal for
Radar Technologies and Applications

IEEE Robert N. Noyce Medal
Sponsored by Intel Foundation

Sponsored by Raytheon Company

Henry I. Smith

Hugh Griffiths

For contributions to lithography and nanopatterning through experimental advances in
short-wavelength exposure systems and
attenuated phase-shift masks

For technical leadership and exceptional
contributions to multistatic radar

With over five decades of pioneering contributions and "wellbefore-their-time" inventions, Henry I. Smith's nanopatterning
technologies have been critical to the semiconductor industry's
ability to produce the high-performance, low-cost electronics we
take for granted today. Smith pioneered the field of nanofabrication and helped establish it as an academic discipline through his
publications and by founding the Nanostructures Laboratory at
the Massachusetts Institute of Technology. Among his many important contributions to nanopatterning are the attenuated phaseshift mask and liquid-immersion lithography. He demonstrated
that using a partially transparent metal film to attenuate an optical
signal, while simultaneously inverting its phase, yields a sharper
intensity gradient in patterns on semiconductor wafers. Improved
image contrast and higher resolution for dense and isolated features were made possible. Smith's attenuated phase-shift mask is
now used in manufacturing practically every high-performance
semiconductor chip. Smith was also the first to demonstrate enhanced resolution in optical-projection lithography with liquid
immersion, long before the semiconductor industry anticipated
the need for such methods. In liquid immersion, the shorter effective wavelength of light enables a higher numerical aperture,
allowing deep-sub-wavelength patterning of features on the wafer surface. Smith's work inspired the development of what is now
the state of the art in nanolithography for the latest high-performance chips. Smith also demonstrated that soft x-ray lithography
can be used to fabricate sub-100-nm structures and complicated
integrated circuits. This led to extreme ultraviolet lithography,
which many consider the main contender for future integrated
circuit manufacturing.
An IEEE Life Fellow and member of the U.S. National Academy of Engineering, Smith is a Professor Emeritus with the Massachusetts Institute of Technology, Cambridge, MA, USA.

A world-renowned radar researcher, Hugh Griﬃths' pioneering
work on multistatic radar and creating and advancing passive radar technologies changed traditional thinking of radar methods
and has provided solutions for dealing with the challenges of increasing spectrum congestion. Utilizing nonradar transmitters,
passive radar uses bistatic techniques. Griﬃths conducted some
of the first experiments on passive bistatic radar and published
the first paper on the topic. Although real-time signal processing constraints initially proved to be challenging, he overcame
early roadblocks to create the commensal passive bistatic radar, in
which broadcast or communications waveforms, such as television signals, are optimized not only for their primary function
but also as radar signals. Griﬃths' work spurred further research
into passive radar, the results of which can be seen in today's technologies where passive radar receivers with embedded high-performance computers may provide an alternative to active radars
for operation in spectrally congested environments. Griﬃths has
also led a program to measure the bistatic radar signatures of sea
clutter and small maritime targets. He helped develop a unique
multistatic radar system called NetRAD that demonstrated bistatic sea clutter as less spiky than monostatic clutter and provided performance advantages of several decibels. Called "clutter
diversity," this work is being extended to other radar frequencies
and configurations. He also initiated and led a program using
synthetic aperture sonar to detect and classify objects such as naval mines, pipelines, or wrecks using an autonomous underwater
vehicle incorporating algorithms that correct for irregular vehicle
motion and propagation inhomogeneities through seawater. The
results, featuring well-focused images of targets at ranges in excess
of 200 meters with spatial resolution of a few centimeters, were
some of the first of their kind.
An IEEE Fellow and Fellow of the U.K. Royal Academy of
Engineering, Griﬃths is the THALES/Royal Academy Chair of
RF Sensors in the Department of Electronic and Electrical Engineering at University College London, London, UK.

Scope: For exceptional contributions to the microelectronics industry.

Scope: For outstanding accomplishments in advancing the fields
of radar technologies and their applications.

13 | 2017 IEEE awards bOOkLET

Table of Contents for the Digital Edition of IEEE Awards Booklet - 2017