IEEE Solid-States Circuits Magazine - Fall 2021 - 27

610 µm
SC
Module
1
SC
Module
4
Voltage
Reference
and LDO
for RO
SC
Module
2
Test
Structures
SC
Module
3
FIGURE 4: The chip micrograph of a reconfigurable switched-capacitor dc-dc converter designed using a 130-nm CMOS process with integrated
Fe-caps [12]. LDO: low dropout; SC: switched capacitor; RO: ring oscillator.
Integrated Magnetics for Energy
Harvesting and Current Sensing
With resistors and capacitors already
integrated into the CMOS process,
the recent advances in fabrication
have also brought inductors and
transformers, which are typically the
largest passives in a circuit, on chip.
Although air core coils have been
used widely in high-frequency circuits
for decades, the push toward
miniaturization has led to the development
of integrated magnetics with
a high-permeability magnetic core
deposited on silicon. Having an integrated
magnetic core not only saves
the cost of using larger discrete components,
but also extends the use of
magnetic circuits to lightweight and
wearable applications.
Integrated magnetics are formed
by depositing a thin (1 to 20 µm in
thickness) ferromagnetic layer on
top of the silicon stack postprocessing
[13], [14]. They have been used
in fluxgate, integrated-magnetic concentrator
Hall, and magnetoresistive
sensors as well as many other applications
[14]-[16]. Figure 5 displays a
sample rendering of a solenoidal inductor
and transformer, which uses
copper (Cu) layers above and below
the core along with vias to form
coils. Two applications of integrated
magnetics for use in different industries
follow.
Integrated Transformers for
Thermal Energy Harvesting
Energy harvesting can provide a batteryless
alternative that powers millions
of wireless sensors in smart
homes and buildings, wearable devices,
remote sensing, and many other IoT
applications. For wearable electronics,
thermal energy harvesting is particularly
well suited, but it requires a small
and lightweight solution. Thermoelectric
generators [Figure 6(a)] in the
wearable range with a 1-2-K thermal
gradient across the plates can provide
roughly 20 to 50 mV of open circuit voltage,
which needs to be harvested with
Bond Pad
Copper Layers
and Vias
Top Via
(a)
Magnetic
Core
Top Metal
Layer
(b)
FIGURE 5: An animated rendering of on-chip magnetics. (a) The cross-sectional view of a
solenoidal inductor with a permalloy magnetic core deposited on a silicon stack and (b) the
top view of a transformer with a primary winding in the middle and secondary winding on
either side.
IEEE SOLID-STATE CIRCUITS MAGAZINE
FALL 2021
27
Test Structures
Control Circuit
600 µm

IEEE Solid-States Circuits Magazine - Fall 2021

Table of Contents for the Digital Edition of IEEE Solid-States Circuits Magazine - Fall 2021

Contents
IEEE Solid-States Circuits Magazine - Fall 2021 - Cover1
IEEE Solid-States Circuits Magazine - Fall 2021 - Cover2
IEEE Solid-States Circuits Magazine - Fall 2021 - Contents
IEEE Solid-States Circuits Magazine - Fall 2021 - 2
IEEE Solid-States Circuits Magazine - Fall 2021 - 3
IEEE Solid-States Circuits Magazine - Fall 2021 - 4
IEEE Solid-States Circuits Magazine - Fall 2021 - 5
IEEE Solid-States Circuits Magazine - Fall 2021 - 6
IEEE Solid-States Circuits Magazine - Fall 2021 - 7
IEEE Solid-States Circuits Magazine - Fall 2021 - 8
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IEEE Solid-States Circuits Magazine - Fall 2021 - 27
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IEEE Solid-States Circuits Magazine - Fall 2021 - Cover3
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