Tech Briefs Magazine - September 2021 - PIT-25
tained thin layers of other metals,
such as titanium or silver, at
different depths. Because these
materials have different reflective
properties from the silicon,
they can be detected in the
reflected radiation. The
method is so precise that not
only can the deep structure of
the tiny samples be displayed
with nanometer accuracy, but
- due to the differing reflective
behavior - the chemical
composition of the samples can
also be determined precisely
and, above all, in a non-destructive
manner. " This makes
coherence tomography an
interesting application for
inspecting
semiconductors,
Prof. Dr. Gerhard Paulus, PhD student Felix Wiesner and Dr. Silvio Fuchs (from left) in a laser lab. (Image: Jens Meyer,
University of Jena)
length of between 10 and 80 nanometers
using infrared lasers. Like the irradiated
laser light, the resulting broadband XUV
light is also coherent, which means that it
has laser-like properties.
In the work described in their current
paper, the physicists exposed nanoscopic
layer structures in silicon to the coherent
XUV radiation and analyzed the
reflected light. The silicon samples consolar
cells, or multilayer optical
components, " said Professor
Gerhard Paulus. It could be
used for quality control in the
manufacturing process of such nanomaterials,
to detect internal defects or
chemical impurities.
For more information, contact Silvio
Fuchs at silvio.fuchs@uni-jena.de.
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Tech Briefs Magazine - September 2021
Table of Contents for the Digital Edition of Tech Briefs Magazine - September 2021
Tech Briefs Magazine - September 2021 - Intro
Tech Briefs Magazine - September 2021 - Sponsor
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