Enabling Technology for Organic Electronics Example Modular PRODOS-200 R&D System, 200x200mm2 PVPD™ Tools for Polymer Based Devices or Thin Films Features ■ Proprietary Close Coupled Showerhead® (CCS) technology: proven scalability ■ Vapor phase polymerization process ■ Carrier gas based process: unsurpassed controllability, uniformity and material utilization ■ Solvent-free “all-dry” deposition technology Devices ■ Dielectric and conductive layers · Passivation · Encapsulation Advanced functional polymer thin films · oTFTs Applications ■ Displays · Flexible electronics · E-paper reader · Thin film batteries · Functional coatings · etc. AIXTRON SE · info@aixtron.com · www.aixtron.com