Potentials - July/August 2016 - 37
1
0.8
Exposure
photoresist development threshold is
1 with a steepness of c = 5 .
The initial condition for the exposure function was obtained by
exposing at every point where the
feature is desired, which is shown
on the top left of Fig. 6. This initial condition results in a gross
over-exposure, which is evident in
the dosage and feature geometry
plotted in the top row of Fig. 6. After
20 iterations (middle row), the exposure function and feature geometry
are observed to show significant improvement. After 80 iterations, the
algorithm converges to an optimal
solution with excellent correlation
between the desired and predicted
exposures. Since the beam-width is
0
5
-5
-4
-3
-2
-1
0
1
2
3
4
5
-5
X (µm)
-5
y (µm)
Dosage
y (µm)
5
5
1.6
1.4
1.2
1
0.8
0.6
0.4
0.2
0
x (µm)
-5
Fig5 the desired feature Z(x, y) used in the simulation has a target exposure of 0.9,
which implies a 90% conversion of the photoresist. the exposure area is 10 # 10 nm
with a resolution of 200 nm.
1
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
x (µm)
0
Y (µm)
5
y (µm)
i=1
y (µm)
i = 20
y (µm)
i = 80
y (µm)
-5
-4
-3
-2
-1
0
1
2
3
4
5
-5
5
0
1
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
x (µm)
0.4
0.2
Exposure
-5
-4
-3
-2
-1
0
1
2
3
4
5
-5
0.6
-5
-4
-3
-2
-1
0
1
2
3
4
5
-5
-5
-4
-3
-2
-1
0
1
2
3
4
5
-5
-5
-4
-3
-2
-1
0
1
2
3
4
5
-5
Feature
1
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
x (µm)
-5 -5
0
X (µm)
-5 -5
0
X (µm)
-5 -5
0
X (µm)
1
0.8
0.6
0.4
0.2
0
5
5
0
Y (µm)
5
5
5
0
Y ((µm))
1
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
x (µm)
0
5
5
1
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
x (µm)
1
0.8
0.6
0.4
0.2
1
0.8
8
6
0.6
0.4
4
0.2
2
0
5
5
0
Y (µm)
Fig6 the optimization results with the initial conditions ^i = 1h , a midway point ^i = 20h , and the optimal result ^i = 80h . the exposure
function, resulting dosage, and feature geometry are plotted in the left, middle, and right columns. the optimized feature is observed to
closely match the desired feature plotted in fig. 5.
IEEE PotEntIals
Jul y/August 201 6
■
37
Table of Contents for the Digital Edition of Potentials - July/August 2016
Potentials - July/August 2016 - Cover1
Potentials - July/August 2016 - Cover2
Potentials - July/August 2016 - 1
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Potentials - July/August 2016 - Cover4
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